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Microcantilever heater-thermometer with integrated temperature-compensated strain sensor
Microcantilever heater-thermometer with integrated temperature-compensated strain sensor
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机译:带有集成温度补偿应变传感器的微悬臂式温度计
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摘要
The present invention provides microcantilever hotplate devices which incorporate temperature compensating strain sensors. The microcantilever hotplate devices of the present invention comprise microcantilevers having temperature compensating strain sensors and resistive heaters. The present invention also provides methods for using a microcantilever hotplate for temperature compensated surface stress measurements, chemical/biochemical sensing, measuring various properties of compounds adhered to the microcantilever hotplate surface, or for temperature compensated deflection measurements.
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