Computer program product for excluding variations attributable to equipment used in semiconductor wafer manufacturing from split analysis procedures

摘要

Excluding variations attributable to equipment from split analysis is performed by identifying dependent variables related to at least one of the split analysis or an experiment to be performed. A test is performed to ascertain whether or not a variation attributable to equipment exists with respect to any of the identified dependent variables. If such a variation exists, a target data set and a training data set are constructed. A signature is identified for the variation. A statistical model is selected based upon the identified signature. The selected statistical model is constructed using the training data set to generate a statistical output. The target data set is joined with the statistical output. The identified dependent variables in the target data set are adjusted using the statistical output. The target data set including the adjusted identified dependent variables is loaded to an application for performing split analysis.