Lithium ion conducting lithium sulphur oxynitride thin film, and a process for the preparation thereof

摘要

The disclosure herein relates to a lithium ion conducting electrolyte. This electrolytic material has improved ionic conductivity. The material disclosed herein is an amorphous compound of the formula Li_xSM_wO_yN_z wherein x is between approximately 0.5 and 3, y is between 1 and 6, z is between 0.1 and 1, w is less than 0.3 and M is an element selected from B, Ge, Si, P, As, Cl, Br, I, and combinations thereof. The material can be prepared in the form of a thin film. The electrolyte material can be used in microbatteries and electronic systems.