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Scanning electron microscope having multiple detectors and a method for multiple detector based imaging
Scanning electron microscope having multiple detectors and a method for multiple detector based imaging
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机译:具有多个检测器的扫描电子显微镜以及用于基于多个检测器的成像的方法
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摘要
A system and method for multi detector detection of electrons, the method includes the steps of directing a primary electron beam, through a column, to interact with an inspected object, directing, by introducing a substantial electrostatic field, electrons reflected or scattered from the inspected objects towards multiple interior detectors, whereas at least some of the directed electrons are reflected or scattered at small angle in relation to the inspected object; and receiving detection signals from at least one interior detector.
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