SCANNING ELECTRON MICROSCOPE HAVING MULTIPLE DETECTORS AND A METHOD FOR MULTIPLE DETECTOR BASED IMAGING

摘要

The invention discloses a kind of method and systems using multiple detectors (14,40) detection electronics, and the method includes the following steps: guidance primary electron beam is by a column (column) to contact detected object (wafer); By introducing strong electrostatic field, guide the electronics for being reflected by detected object (wafer) or being scattered into multiple interior detectors (14,40), while at least some electronics being guided are relative to the lesser angle reflection of the detected object (wafer) or scattering; And receive the detection signal from least one interior detectors.