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Outer surface-inspecting method and outer surface-inspecting apparatus
Outer surface-inspecting method and outer surface-inspecting apparatus
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机译:外表面检查方法及外表面检查装置
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摘要
A outer surface-inspecting method for judging whether a defect of a defective portion (27) extracted from an inspection area in an image (21A) of an object through comparison with a template is acceptable or not, comprising: dividing the inspection area into a plurality of sections (22, 23, 24a, 24b, 25a, 25b, 28a, 28b, 28c) respectively having different acceptable levels (CONDITION 1-5); preliminarily judging, when at least one extracted defective portion (27) spreads out over some of the sections (28a, 28b, 28c) respectively having different acceptable levels (CONDITION 3-5), whether defects of parts (27a, 27b, 27c) of the defective portion (27), each part (27a, 27b, 27c) being located on a different section (28a, 28b, 28c), are acceptable or not on a part to part basis according to the acceptable levels (CONDITION 3-5) of the sections (28a, 28b, 28c) on which the parts (27a, 27b, 27c) of the defective portion (27) are respectively located; and judging whether the defect of the defective portion (27) is acceptable or not based on the result of the preliminary judgment.
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机译:一种外表面检查方法,用于通过与物体的比较来判断是否从物体的图像( 21 B> A)的检查区域中提取出的缺陷部分( 27 B>)的缺陷。模板是否可接受,包括:将检查区域分为多个部分( 22、23、24 B> a I> ,24 B> b I> ,25 B> a I> ,25 B> b I> ,28 B> < I> a I> ,28 B> b I> ,28 B> c I>)分别具有不同的可接受级别(条件< B> 1 B>- 5 B>);初步判断,当至少一个提取的缺陷部分( 27 B>)散布在某些部分( 28 B> a I> ,28 < / B> b I> ,28 B> c I>)分别具有不同的可接受级别(条件 3 B>- 5 < / B>),零件( 27 B> a I> ,27 B> b I> ,27 缺陷部分( 27 B>)的B> c I>),每个零件( 27 B> a I> ,27 B> b I> ,27 B> c I>)位于其他部分( 28 B> a < / I> ,28 B> b I> ,28 B> c I>),部分接受还是不接受达到(B <28> B B> a I> ,28 < / B> b I> ,28 B> c I>),其上的部分( 27 B> a I>)缺陷部分( 27 B>)的,27 B> b I> ,27 B> c I>)是分别位于根据初步判断的结果,判断缺陷部位( 27 B>)的缺陷是否可以接受。
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