首页> 外国专利> ELECTRICAL VIBRATION generating device WHICH IS CONTAINED IN A SEMICONDUCTOR PLANT OR INCLUDED THEREIN SEMICONDUCTOR SUBSTRATE TRANSFER / treatment-TUNNEL ARRANGEMENT TO ASSIST IN IT EXCITING IT AND THEN MAINTAIN SUCH AN ELECTRICAL POWER STRIP-SHAPED TRANSDUCERS WHICH ARE INCLUDED IN THE TOP AND / OR UNDER-BLOCK TUNNEL PORTION OF SUCH AN ARRANGEMENT-TUNNEL THAT THUS THE LEAST ALSO DURING OPERATION WILL BE UNINTERRUPTED MAINTAIN A MINIMUM LOW FREQUENCY pulsing CONDITION AT LEAST A TYPICAL HIGH-FREQUENCY VIBRATORY CONDITION OF SUCH Transduction

ELECTRICAL VIBRATION generating device WHICH IS CONTAINED IN A SEMICONDUCTOR PLANT OR INCLUDED THEREIN SEMICONDUCTOR SUBSTRATE TRANSFER / treatment-TUNNEL ARRANGEMENT TO ASSIST IN IT EXCITING IT AND THEN MAINTAIN SUCH AN ELECTRICAL POWER STRIP-SHAPED TRANSDUCERS WHICH ARE INCLUDED IN THE TOP AND / OR UNDER-BLOCK TUNNEL PORTION OF SUCH AN ARRANGEMENT-TUNNEL THAT THUS THE LEAST ALSO DURING OPERATION WILL BE UNINTERRUPTED MAINTAIN A MINIMUM LOW FREQUENCY pulsing CONDITION AT LEAST A TYPICAL HIGH-FREQUENCY VIBRATORY CONDITION OF SUCH Transduction

机译:包含在半导体设备中或包含在其中的电振动产生装置,以协助激励或解决隧道中的基板基质转移,然后维护其中包含/或在其中弯成一排的带电形状的传感器这样的布置隧道的整体隧道部分,因此在操作过程中最少也不会中断,从而至少在典型的高频振动振动条件下保持最低的低频脉动状态

摘要

机译:

著录项

  • 公开/公告号NL1037066C

    专利类型

  • 公开/公告日2010-12-27

    原文格式PDF

  • 申请/专利权人 BOK EDWARD;

    申请/专利号NL20091037066

  • 发明设计人 BOK EDWARD;

    申请日2009-06-23

  • 分类号H01L21;

  • 国家 NL

  • 入库时间 2022-08-21 18:05:14

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