COMPONENTS FOR EUV LITHOGRAPHIC APPARATUS, EUV LITHOGRAPHIC APPARATUS INCLUDING SUCH COMPONENTS AND METHOD FOR MANUFACTURING SUCH COMPONENTS.

• 1. 在EUV反射镜上制造由氧化硅构成的覆盖层的方法、EUV反射镜和EUV光刻设备 [P] . 中国专利： CN103930805B . 2017.03.29
• 2. 在EUV反射镜上制造由氧化硅构成的覆盖层的方法、EUV反射镜和EUV光刻设备 [P] . 中国专利： CN103930805A . 2014-07-16
• 3. COMPONENTS FOR EUV LITHOGRAPHIC APPARATUS, EUV LITHOGRAPHIC APPARATUS INCLUDING SUCH COMPONENTS AND METHOD FOR MANUFACTURING SUCH COMPONENTS [P] . 韩国专利： KR20130129899A . 2013-11-29

  机译： EUV光刻设备的组件，包括此类组件的EUV光刻设备和制造此类组件的方法

• 4. Components for EUV Lithographic Apparatus, EUV Lithographic Apparatus Including Such Components and Method for Manufacturing Such Components [P] . 美国专利： US2013114059A1 . 2013-05-09

  机译： EUV光刻设备的组件，包括此类组件的EUV光刻设备和制造此类组件的方法

• 5. COMPONENTS FOR EUV LITHOGRAPHIC APPARATUS, EUV LITHOGRAPHIC APPARATUS INCLUDING SUCH COMPONENTS AND METHOD FOR MANUFACTURING SUCH COMPONENTS [P] . 世界知识产权组织专利： WO2012004070A1 . 2012-01-12

  机译： EUV光刻设备的组件，包括此类组件的EUV光刻设备和制造此类组件的方法

• 1. Optimization of Quality Consistency Problem of Electromechanical Component due to Manufacturing Uncertainties with a Novel Tolerance Design Method [J] . DENG Jie, YE Xue-rong, WANG Ying-qi, 东华大学学报（英文版） . 2014,第006期
• 2. Component synthesis vibration suppression method of two component forces for flexible spacecraft [J] . QI Nai-ming, ZHAO Bao-shan, ZHAO Li-jun, 哈尔滨工业大学学报（英文版） . 2012,第006期
• 3. SOURCE MATERIAL DELIVERY SYSTEM, EUV RADIATION SYSTEM, LITHOGRAPHIC APPARATUS, AND METHODS THEREOF [J] . Research Disclosure . 2021,第681期
• 4. A SEED LASER OPTICAL ISOLATOR, SEED ISOLATOR MODULE, EUV RADIATION SOURCE, LITHOGRAPHIC APPARATUS AND OPTICAL ISOLATOR OPERATING METHOD [J] . Research Disclosure . 2021,第687期
• 5. LASER BEAM METROLOGY SYSTEM, LASER BEAM SYSTEM, EUV RADIATION SOURCE AND LITHOGRAPHIC APPARATUS [J] . Research Disclosure . 2021,第687期
• 6. Gas curtain for mitigating hydrocarbon contamination of EUV lithographic optical components [C] . Michael P. Kanouff, Avijit K. Ray-Chaudhuri Conference on emerging lithographic technologies . 1999
• 7. Broadband microwave lithographic three-dimensional components. [D] . Ehsan, Negar. 2010
• 8. Metabolic growth rate control in Escherichia coli may be a consequence of subsaturation of the macromolecular biosynthetic apparatus with substrates and catalytic components. [O] . K F Jensen, S Pedersen 1990
• 9. Method and apparatus for vibration detection, method and apparatus for vibration analysis, lithographic apparatus, device manufacturing method, and computer program [O] . Haico Victor Kok 2008

• 1. PMI Foam Cored Sandwich Components Produced by Means of Different Manufacturing Methods [J] . Leonhard Maier ,HU Pei ,Herman Seibert . 材料工程 . 2006,第005期
• 2. Manufacture of Bulk Amorphous Crystal and Micro-Crystal for Pr_(60)Cu_((20-x))Ni_(10)Al_(10)Fe_x and Characteristics of Its Magnetic Apparatus [J] . 孙晓华 ,赵军 ,孙广杰 . 稀土学报：英文版 . 2006,第z2期
• 3. Evaluation of Dissolved Organic Carbon Using Synchronized Fluorescence Emission Spectra and Unsupervised Method of Principal Component Analysis (PCA) and Independent Component Analysis (ICA) [J] . Tais Cristina Filippe ,Luana Mayumi Takahasi Marques ,Heloise G. Knapik . 水资源与保护（英文） . 2019,第3期
• 4. 用于屋顶电站的轻量化组件及其安装设计无框光伏组件封装及轻量化屋顶电站安装应用轻型光伏组件封装材料及轻型屋顶电站安装方式无框双玻晶体硅光伏组件封装方式薄膜光伏组件封装的可靠性分析 [C] . 杨若峰 . 第七届分布式光伏发电项目申请、设计优化、建设管理及运维技术研讨会 . 2016
• 5. 面向纳米压印光刻设备的精密定位工作台的设计方法与实验 [A] . 贾晓辉 . 2010