MINIROBOT XYZ WITH PIEZOELECTRIC DRIVE OF NANOMETRIC PRECISION

摘要

The invention relates to a minirobot with piezoelectric drive performing linear motion of nanometric precision on the axes X, Y and Z, meant for handling relatively large loads in low-volume operating spaces. According to the invention, the minirobot comprises two subassemblies (a and b) assembled and guided in relation to each other by two leaf springs (1 and 2) fixed, at one end, to a base body (3) of the first subassembly (a) and, at the other end, to a framework piece (6) of the other subassembly (b), the motion on the axis Z being performed by means of a linear piezoelectric actuator (7) and being measured by means of a capacitive transducer having two armatures (8 and 10), namely a fixed one and a mobile one, the motion along the other axes, X and Y, being performed by means of two further linear piezoelectric actuators (11 and 12) and measured by two further capacitive transducers, each of them having two armatures (16, 14 and 17, 15), namely a fixed one and a mobile one.