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METHOD FOR PRODUCING high-purity monocrystalline silicon by the method of uncrucible zone melting and plant for realization thereof

机译:难熔区熔融法生产高纯单晶硅的方法及其实现装置

摘要

A method for producing high-purity monocrystalline silicon by the method of uncrucible zone melting, in which the technological process of refining of the metallurgical silicon is carried out, using at least two similar devices, at that after the finishing of the preparation of the first device to the process of refining and to the start of the technological refining process of the metallurgical silicon, a second similar device is automatically applied and preparation thereof is carried out with following realization of the refining process, and after the finishing of the technological refining process in the first device and its automatically shut off, the workpiece of the refined silicon is removed from it and then its preparation to the refining process of the following workpiece of metallurgical silicon is carried out again. The plant for producing high-purity monocrystalline silicon by the method of uncrucible zone melting contains the device with the block of temperature measurement, which is optically connected to the melting zone of the material and is electrically connected to the program control unit, and the program control unit is electrically connected to the block of temperature measurement with the energy source and mechanism of movement.
机译:一种通过不熔化的区域熔化法生产高纯度单晶硅的方法,其中,使用至少两个类似的装置,在完成第一个制备之后,进行冶金硅的精制工艺过程。在冶金硅的精炼过程和技术精炼过程开始之前,自动应用第二个类似的设备,并在实现精炼过程之后以及在精炼过程完成之后进行制备在第一个设备中并自动关闭后,将精制硅的工件从中移除,然后再次进行其准备,以对随后的冶金硅工件进行精制。通过不间断区域熔化方法生产高纯度单晶硅的工厂包含带有温度测量模块的设备,该设备光学连接到材料的熔化区域,并电连接到程序控制单元和程序控制单元通过能源和运动机制与温度测量模块电气连接。

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