Ultrasonic transducer micromachined capacitive with resonant cavities and their applications in air.

摘要

micromachined ultrasonic transducer with capacitive resonant cavities and their applications in air.; The invention describes a useful ultrasonic device for emitting sound waves in air in the range of ultrasound comprising, among other elements, a resonant cavity with one or more openings to cause an amplification of signal emission and an element that excites the system such as the case of membranes. Thanks to the resonant cavity can generate radiation in the joint openings and in phase with that produced by the movement of the membrane. This ultrasound device may be used to manufacture a transmitter, comprising one or more of these cells connected in parallel and thereby emitting useful for conducting nondestructive testing without air contact.