VERTICAL COPLANAR WAVEGUIDE WITH TUNABLE CHARACTERISTIC IMPEDANCE, DESIGN STRUCTURE AND METHOD OF FABRICATING THE SAME

摘要

An on-chip vertical coplanar waveguide with tunablechar-acteristic impedance, a design structure, and a method of making thesame.An on-chip transmission line (60) includes a signal line (65), an upperground line (70) spaced apart from and above the signal line, and a lowerground line (75) spaced apart from and below the signal line. The signalline, the upper ground line and the lower ground line are substantiallyver-tically aligned in a dielectric material (80).