VERTICAL COPLANAR WAVEGUIDE WITH TUNABLE CHARACTERISTIC IMPEDANCE, DESIGN STRUCTURE AND METHOD OF FABRICATING THE SAME

摘要

An on-chip vertical coplanar waveguide with tunable characteristic impedance, a design structure, and a method of making the same. An on-chip transmission line (60) includes a signal line (65), an upper ground line (70) spaced apart from and above the signal line, and a lower ground line (75) spaced apart from and below the signal line. The signal line, the upper ground line and the lower ground line are substantially vertically aligned in a dielectric material (80).