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PHOTOLITHOGRAPHICALLY PATTERNED THICK-FILM SENSOR

机译:光成像图形化厚膜传感器

摘要

In a sensor, in particular an impedance sensor, for example a soot sensor, which has two electrodes which are electrically insulated from another, wherein at least one outer electrode comprising a composite of metal and inorganic oxide is in the form of a layer pattern with a layer thickness of 0.5 to 20 μm, the track width of the layer pattern and the distance between the tracks are 5 to 70 μm according to the invention and the edge region fluctuates around the conductor track edge by less than 10 μm. Both electrodes may be arranged beside one another as a layer pattern in a plane. The sensor preferably has a heater. For mass production, electrodes are produced on electrically insulating oxidic substrates to form a layer pattern with a layer thickness of 0.5 to 20 μm and, after the entire surface has been overprinted with a paste containing metal powder and oxide, the electrodes are patterned in a particularly accurate manner from the printed layer to form tracks. In particular, the layer thickness of the printed layer is reduced.
机译:在传感器中,尤其是阻抗传感器,例如烟尘传感器,其具有两个彼此电绝缘的电极,其中至少一个包括金属和无机氧化物的复合物的外部电极为层状图案,其中根据本发明,层厚度为0.5至20μm,层图案的轨道宽度以及轨道之间的距离为5至70μm,并且边缘区域在导体轨道边缘周围波动小于10μm。两个电极可以作为层图案在平面中彼此并排布置。传感器优选地具有加热器。为了批量生产,在电绝缘的氧化基板上生产电极,以形成层厚为0.5至20μm的层图案,并在整个表面上用含金属粉末和氧化物的糊剂套印后,在从印刷层以特别精确的方式形成轨道。特别地,减小了印刷层的层厚度。

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