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X-ray fluorescence analyzer having means for producing lowered pressure, and an X-ray fluorescence measurement method using lowered pressure
X-ray fluorescence analyzer having means for producing lowered pressure, and an X-ray fluorescence measurement method using lowered pressure
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机译:具有降低压力的装置的X射线荧光分析仪以及使用降低的压力的X射线荧光测量方法
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摘要
An X-ray fluorescence analyzer has a structure that defines a chamber (102, 505). There is a window (103) to the chamber in a surface that is to come next to a sample (101) outside the chamber. The window (103) comprises a foil that is permeable to X-rays. A detector (104) receives fluorescent X-rays through said window (103). A low pressure source (508) is coupled to the chamber (102, 505) and configured to controllably lower the pressure of a gaseous medium in the chamber (102, 505) to a pressure value between 760 torr and 10 torr. The X-ray fluorescence analyzer maintains a lowered pressure of a value between 760 torr and 10 torr in the chamber (102, 505) for the duration of an X-ray fluorescence measurement.
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