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METHOD FOR REGULATING CAPACITANCE VALUE OF BUILT-IN CAPACITOR IN MULTILAYERED CERAMIC SUBSTRATE, AND MULTILAYERED CERAMIC SUBSTRATE AND PROCESS FOR PRODUCING THE SAME
METHOD FOR REGULATING CAPACITANCE VALUE OF BUILT-IN CAPACITOR IN MULTILAYERED CERAMIC SUBSTRATE, AND MULTILAYERED CERAMIC SUBSTRATE AND PROCESS FOR PRODUCING THE SAME
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机译:调节多层陶瓷基板中内置电容的电容值的方法,多层陶瓷基板及其制造工艺
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摘要
In a multilayer ceramic substrate, without significantly changing the insulation resistance between capacitor electrodes and the Q value of a capacitor, there is provided a method for performing laser trimming to obtain a precise capacitance value of a built-in capacitor.;In a multilayer ceramic substrate (1) having a built-in capacitor (2) formed in a ceramic laminate (6) composed of a plurality of ceramic layers (3 to 5) laminated to each other, the built-in capacitor (2) being formed of a first capacitor electrode (7), a second capacitor electrode (8), and the dielectric glass ceramic layer (4), the capacitance value of the built-in capacitor (2) is regulated by performing laser trimming of the first capacitor electrode (7). In this case, the dielectric glass ceramic layer (4) is formed of a TiO2-based dielectric glass ceramic layer in which the content of dielectric grains including TiO2 is 10 to 35 percent by volume.
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