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ELECTROMAGNETIC FIELD MEASURING DEVICE, ELECTROMAGNETIC FIELD MEASURING METHOD USED FOR THE MEASURING DEVICE, AND NON-TRANSITORY COMPUTER-READABLE MEDIUM IN WHICH ELECTROMAGNETIC FIELD MEASUREMENT CONTROL PROGRAM IS STORED
ELECTROMAGNETIC FIELD MEASURING DEVICE, ELECTROMAGNETIC FIELD MEASURING METHOD USED FOR THE MEASURING DEVICE, AND NON-TRANSITORY COMPUTER-READABLE MEDIUM IN WHICH ELECTROMAGNETIC FIELD MEASUREMENT CONTROL PROGRAM IS STORED
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机译:存储电磁场测量控制程序的电磁场测量设备,用于测量设备的电磁场测量方法和非瞬态计算机可读介质
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摘要
Provided is an electromagnetic field measuring device for measuring an electromagnetic field with high sensitivity in a micro-region into which electronic devices are densely packed, and the like. Specifically provided is an electromagnetic field measuring device, wherein the amplitude level of signal light (pf) is adjusted by an analyzer (34) by adjusting the angle with respect to the plane of polarization of the signal light (pf) on the basis of an amplitude level control signal (eb) given from a calculation control unit (40). On the basis of the spectrum (ea) of an electrical signal (ed) measured by an RF spectrum analyzer (39), the amplitude level control signal (eb) is given to the analyzer (34) by the calculation control unit (40). The ratio of the amplitude levels of a carrier and a sideband which are included in signal light (ph) incident on a light receiver (38) is controlled at a constant value.
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