PROBE APPARATUS WITH OPTICAL LENGTH-MEASURING UNIT AND PROBE TESTING METHOD

摘要

A probe apparatus (100) with control-position detection means is provided for testing an electrical characteristic of a to-be-tested object formed on a substrate W. The probe apparatus includes a prober chamber (29), a susceptor (6) provided in the prober chamber for placing thereon a to-be-tested object, and a moving mechanism (16) for moving the susceptor in X-, Y-, Z- and ¸-directions. The probe apparatus further includes a probe card (14) having a plurality of probes (26) and opposing the susceptor, and a first optical length-measuring unit (4a, 4b). The first length-measuring unit emits light to the surface of the to-be-tested object placed on the susceptor, and detects the Z-directional position of the to-be-tested object based on the light reflected from the object. The probe apparatus can have a second length-measuring unit (5a, 5b).