SUBSTRATE FOR FLEXIBLE DEVICE, THIN FILM TRANSISTOR SUBSTRATE FOR FLEXIBLE DEVICE, FLEXIBLE DEVICE, SUBSTRATE FOR THIN FILM ELEMENT, THIN FILM ELEMENT, THIN FILM TRANSISTOR, METHOD FOR MANUFACTURING SUBSTRATE FOR THIN FILM ELEMENT, METHOD FOR MANUFACTURING THIN FILM ELEMENT, AND METHOD FOR MANUFACTURING THIN FILM TRANSISTOR

摘要

Disclosed is a substrate for flexible devices, with which deterioration of electrical performance of a TFT due to recesses and protrusions on the surface of a metal foil can be suppressed and peeling and cracks of the TFT can be also suppressed, in the case where the TFT is manufactured on a flexible substrate having a metal layer and a polyimide layer stacked thereon.The substrate for flexible devices has: the metal foil (2); a planarization layer (3), which is formed on the metal foil and contains polyimide; and an adhesive layer (4), which is formed on the planarization layer (3) and contains an inorganic compound.