DEVICE FOR POSITIONING AND/OR PRESSING A PLANAR COMPONENT RELATIVE TO A SUBSTRATE AND METHOD FOR POSITIONING A PICKING TOOL RELATIVE TO A SUBSTRATE

摘要

A device (1) for pressing a planar component (2) against a substrate (3), preferably on a die-bonder, has a tool support (4) on which a picking tool (5) is arranged, preferably movable in multiple degrees of freedom. This picking tool is mounted directly or indirectly on the tool support via at least one air bearing (6, 7, 8) that can be applied with compressed air, wherein the mounting position on the air bearing in the non-pressurized condition can be fixed using a pretensioning force. For the air bearings, pivoting air bearings and/or rotational air bearings can be used. With a device of this kind, the picking tool can be optimally positioned on the substrate under process conditions. The positioning takes place with the air bearing activated, wherein the position, once adopted, is sustained by optionally blocking the air bearings.