HEIGHT MEASUREMENT METHOD, PROGRAM FOR MEASURING HEIGHT, AND HEIGHT MEASUREMENT DEVICE

摘要

Disclosed are a height measurement method, height measurement program, and height measurement device that illuminate a specimen with an epi-illumination device or project a projection pattern on the specimen, scan from the light axis direction, image the specimen or the projected pattern using an imaging device of an image forming optical system, and consider the position at which the focusing measurement value in the imaging device becomes the greatest to be a surface position of the subject and acquire a height value. The height measurement method, program and device determine ahead of time a height correction value, which corresponds to the inclination angle of the specimen surface, as an angle correction value, determine the inclination angle of the specimen surface corresponding to each pixel position from the height value determined for each pixel of the imaging device, determine from the angle correction value the height correction value corresponding to the determined inclination angle, and using the determined height correction value, correct the height value of the surface of the specimen corresponding to each pixel.