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SENSOR IN MICROMECHANICAL DESIGN

机译:微机械设计中的传感器

摘要

The invention relates to a vibration-type measurement transducer (1) for measuring a mass flow of a flowing medium, comprising two straight measurement tubes (2) for routing the medium, wherein the measurement tubes (2) are disposed parallel with respect to one another and wherein the measurement transducer is designed in micromechanical format. The vibration-type measurement transducer (1) according to the invention permits reliable measurement of the smallest mass flows of a flowing medium, such as a liquid or a gas.
机译:本发明涉及一种用于测量流动介质的质量流量的振动型测量传感器(1),其包括两个用于引导介质的直的测量管(2),其中,测量管(2)相对于一个平行设置。另一个,其中测量换能器以微机械形式设计。根据本发明的振动型测量变换器(1)允许可靠地测量诸如液体或气体的流动介质的最小质量流量。

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