ORGANIC MATERIAL DEPOSITION APPARATUS AND METHOD TO MINIMIZE THE TACT TIME OF DEPOSITION PROCESS

摘要

PURPOSE: An organic material deposition apparatus and method are provided to simultaneously perform a substrate transfer and alignment process for a first substrate and a deposition process for a second substrate within the same processing chamber.;CONSTITUTION: An organic material deposition apparatus comprises a chamber(100), an organic material deposition source(300), a first transfer unit(510), and a second transfer unit(520). The inside of the chamber is divided into a first substrate deposition region and a second substrate deposition region. The organic material deposition source moves in the first or second substrate deposition region and sprays organic particles on a first or second substrate. The first transfer unit rotates the organic material deposition source in a first direction to be located in the first or second substrate deposition region. The second transfer unit reciprocates the organic material deposition source in a second direction within the first or second substrate deposition region.;COPYRIGHT KIPO 2011