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COIL-COMB TYPE BLOCK COPOLYMER CAPABLE OF MANUFACTURING A THERMALLY STABLE BLOCK COPOLYMER THIN FILM, AND A MANUFACTURING METHOD OF A NANOSTRUCTURE USING THEREOF
COIL-COMB TYPE BLOCK COPOLYMER CAPABLE OF MANUFACTURING A THERMALLY STABLE BLOCK COPOLYMER THIN FILM, AND A MANUFACTURING METHOD OF A NANOSTRUCTURE USING THEREOF
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机译:可制造热稳定的嵌段共聚物薄膜的线圈梳型嵌段共聚物及其使用的纳米结构的制造方法
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摘要
PURPOSE: A coil-comb type block copolymer, and a manufacturing method of a nanostructure using thereof are provided to simply manufacture a block copolymer thin film including a cylindrical microstructure perpendicularly aligned on a substrate.;CONSTITUTION: A manufacturing method of a cylindrical microstructure comprises the following steps: synthesizing a coil-comb type block copolymer; forming a block copolymer thin film on a substrate, and heat-processing to form a nanostructure including a cylindrical microstructure perpendicularly aligned on the substrate; and ultraviolet ray-radiating, or oxygen-plasma processing the thin film to form a porous polymer thin film including a cylindrical pore.;COPYRIGHT KIPO 2011
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