POSITION MEASURING SYSTEM AND POSITION MEASURING METHOD, MOBILE BODY DEVICE, MOBILE BODY DRIVING METHOD, EXPOSURE DEVICE AND EXPOSURE METHOD, PATTERN FORMING DEVICE, AND DEVICE MANUFACTURING METHOD

摘要

A mirror block on which moving gratings are arranged is fixed to the lower surface of a stage. Fixed gratings are placed on the upper surface of a stage platform that is opposed to the lower surface of the stage. A Y encoder that measures Y positional information of the stage is configured including the moving gratings and the fixed gratings. Similarly, an X encoder that measures X positional information of the stage is configured including the moving gratings and the fixed grating.