FIXING TOOL AND A PROBE FOR INSPECTION, CAPABLE OF DEALING WITH THE MINIATURIZATION AND COMPLICATION OF A SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide an inspection jig including a contactor coping with microfabrication and complexity of a substrate and allowing four terminal measurement having a simple structure with a reduced number of components.;SOLUTION: The inspection jig electrically connecting an inspection device with an object to be inspected includes: an electrode part electrically connected to the inspection device; a first conductive tubular body having one end brought into press contact with an inspection part and the other end brought into press contact with the electrode part; and a second conductive tubular body coaxially arranged in the first tubular body and having one end brought into press contact with the inspection part and the other end brought into press contact with the electrode part. In the first and second conductive tubular bodies, two expanding/contracting parts formed from spiral cutout parts of a tubular wall part and expanding and contracting in a major axis direction are provided via an intermediate part. In the first and second conductive tubular bodies, the first and second conductive tubular bodies are fixed at the respective intermediate parts.;COPYRIGHT: (C)2011,JPO&INPIT