MAINTENANCE DEVICE AND A DISCHARGE DEVICE CAPABLE OF REDUCING TIME AND COSTS FOR THE REPLACEMENT OF A HEAD

摘要

PURPOSE: A maintenance device and a discharge device are provided to enable the cleaning and inspection of each outlet in a discharge device which discharges solution on a substrate.;CONSTITUTION: A maintenance device(10) comprises a first moving cradle(15a), a main moving unit, a main chuck(19), a sub moving unit, and an inspection device. The first moving cradle is mounted on a main rail(72). The main moving unit moves the first moving cradle along the main rail. The main chuck is placed on the first moving cradle. The sub moving unit transfers the main chuck on the first moving cradle. The inspection device is loaded on the main chuck.;COPYRIGHT KIPO 2011