SHOWER HEAD AND A CHEMICAL VAPOR DEPOSITING DEVICE CAPABLE OF REDUCING MANUFACTURING COSTS USING A DISCHARGE TUBE FOR THE SHOWER HEAD

摘要

PURPOSE: A shower head and a chemical vapor depositing device are provided to improve the efficiency of a manufacturing process by reducing the number of installation processes.;CONSTITUTION: A first gas is discharged through a first discharge path(251). A second gas is discharged through a second discharge path(252). The second discharge path is separated from the first discharge path. The first gas and the second gas are respectively supplied to the first discharge path and the second discharge path through different supply surfaces. The first gas and the second gas are discharged from the first discharge path and the second discharge path through the same discharge surface.;COPYRIGHT KIPO 2012