CHARGED PARTICLE SELECTION DEVICE, CAPABLE OF BIASING A GAS CLUSTER WHICH IS IONIZED THROUGH AN ELECTRIC FIELD APPLYING PART, AND A CHARGED PARTICLE IRRADIATION DEVICE THEREOF

摘要

PURPOSE: A charged particle selection device and a charged particle irradiation device thereof are provided to effectively select a gas cluster by applying an electric field which is aligned toward the progressing direction of the gas cluster.;CONSTITUTION: An electric field applying part(21) applies an electric field arranged towards the progressing direction of a gas cluster. The electric field applying part applies an AC voltage to an electrode. The electric field applying part biases an ionized gas cluster. A slit(24), in which the gas cluster is selected, is included. The electric field applying part is composed of two electrodes(22,23).;COPYRIGHT KIPO 2011