MICRO SENSOR FOR CONTROLLING POSITION USING EDDY CURRENT, CAPABLE OF PRECISELY SENSING THE LOCATION AND DIRECTION CHANGE OF A MICRO MACHINE, AND A MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A micro sensor for controlling position using eddy current and a manufacturing method thereof are provided to precisely sense the location and direction change of a micro machine by sensing the changing of eddy current amount.;CONSTITUTION: A micro sensor for controlling position using eddy current comprises a main body(110), an ultra-pure water(130), a balance(120) and a passivation layer(140). The upper is opened and the main body is included in the inner side of the silicon substrate in which the trench of the hollow shape is formed. The ultra-pure water is filled inside a trench of the main body.;COPYRIGHT KIPO 2011