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Method for Preparing Metal Doped Transparent Conductive Oxide Thin Film and Thin Film Transistor Using the Same
Method for Preparing Metal Doped Transparent Conductive Oxide Thin Film and Thin Film Transistor Using the Same
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机译:金属掺杂透明导电氧化物薄膜的制备方法及使用该方法的薄膜晶体管
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摘要
PURPOSE: A method for manufacturing a metal-doped transparent conductive oxide thin film and a thin film transistor using the same are provided to drive the thin film transistor at a low voltage by adjusting the resistance distribution of the transparent conductive oxide thin film. CONSTITUTION: Metal and oxide are simultaneously deposited on a substrate. An oxide film is formed. The metal is doped into the oxide layer. The metal is selected from a group including Mo, Ti, Cu, Sr, Ge, Mg, Y, Zr, B, V, Ta, Tl, Ir, Te, Sb, Cr, Fe, Co, Ru, Ag, Au, Pt, Me, Ni, Sn, Bi, Al, Ga and In. The oxide is selected from a group including ZnO, SnO2, Zn-Sn-O, Ga2O3 and In2O3.
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机译:目的:提供一种用于制造金属掺杂的透明导电氧化物薄膜的方法和使用该方法的薄膜晶体管,以通过调节透明导电氧化物薄膜的电阻分布来以低电压驱动该薄膜晶体管。组成:金属和氧化物同时沉积在基板上。形成氧化膜。金属被掺杂到氧化物层中。所述金属选自Mo,Ti,Cu,Sr,Ge,Mg,Y,Zr,B,V,Ta,Tl,Ir,Te,Sb,Cr,Fe,Co,Ru,Ag,Au, Pt,Me,Ni,Sn,Bi,Al,Ga和In所述氧化物选自包括ZnO,SnO 2,Zn-Sn-O,Ga 2 O 3和In 2 O 3的组。
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