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CLEANING APPARATUS FOR ELIMINATING SLURRY, CAPABLE OF MINIMIZING THE USAGE OF WATER BY MANUFACTURING AN OVERFLOW TYPE RINSE CLEANING BATH
CLEANING APPARATUS FOR ELIMINATING SLURRY, CAPABLE OF MINIMIZING THE USAGE OF WATER BY MANUFACTURING AN OVERFLOW TYPE RINSE CLEANING BATH
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机译:消除污泥的清洁装置,可通过制造溢流型清洗池来减少水的使用
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摘要
PURPOSE: A cleaning apparatus for eliminating slurry is provided to maximize cleaning effect by simultaneously implementing a chemically cleaning process and a physically cleaning process in one cleaning bath.;CONSTITUTION: A sliced silicon wafer and a beam on which the slice wafer is arranged are fixed to a basket. The cleaning bath(2) eliminates slurry on the sliced silicon wafer using a spraying technique. A robot(3) moves a basket. The sliced silicon wafer and the beam are separated using chemical at high temperature in the cleaning bath. A rinse cleaning bath is composed of an overflow type.;COPYRIGHT KIPO 2011
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