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POLISHING APPARATUS FOR FLAT PANEL DISPLAY MULTI-MEASURABLE HEIGHT OF PROTRUSION AND DRIVING METHOD OF THE SAME
POLISHING APPARATUS FOR FLAT PANEL DISPLAY MULTI-MEASURABLE HEIGHT OF PROTRUSION AND DRIVING METHOD OF THE SAME
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机译:平板显示多测量高度的推拉装置及其驱动方法
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摘要
PURPOSE: An apparatus for polishing a flat panel display panel and an operation method thereof are provided to multiply measure the height of a protrusion using a non contact measuring method and a contact measuring method, thereby accurately measuring the height of a protrusion. CONSTITUTION: A stage where a flat display panel(600) is placed is located on the top of an apparatus for polishing a flat panel display panel. The first moving unit(210) is transferred on a table in one direction. The second moving unit(220) is transferred on the first moving unit in the direction vertical to the one direction. The first measuring unit(300) is located in the second moving unit.
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