LOAD PORT DEVICE CAPABLE OF IMPLEMENTING SHORTENING OF TOTAL OPERATION TIME, A COVER BODY ATTACHING DEVICE THEREOF, AND AN ELEVATING APPARATUS CONTROLLING METHOD OF A MAPPING APPARATUS

摘要

PURPOSE: A load port device, a cover body attaching device thereof, and an elevating apparatus controlling method of a mapping apparatus are provided to shorten the total time required for attaching and mapping of a cover body by overlapping the operation time of each device avoiding the interference of the attaching device of a cover body and the mapping device.;CONSTITUTION: A cassette table(J) is horizontally arranged for the load port frame. A cover body absorption plate(5) equipped with a lock and unlock device and a suction plate is installed on the load port frame to be elevating by a first elevating apparatus. A mapping device is elevated by a second elevating device.;COPYRIGHT KIPO 2011