LOAD PORT APPARATUS MAPPING APPARATUS AND METHOD FOR CONTROLLING EACH LIFTING/LOWERING DEVICE OF MAPPING APPARATUS AND COVER ATTACHING/DETACHING APPARATUS CONSTITUTING LOAD PORT APPARATUS

摘要

An object of the present invention is to avoid the interference of the lid body attaching / detaching device constituting the load port device and the mapping device so that the operation time of each device is overlapped as much as possible and the total operation time is shortened.The lid body attaching / detaching device A and the mapping device M constituting the load port device P are provided with a lid body attracting plate 5,_OneThe main arm 23 can be rotated at a position lower than the main arm 23 by a value exceeding the set value and the rotation of the main arm 23 without interfering with the lid body attracting plate 5 The main arm 23 is rotated to the mapped position immediately after the set value is detected by the interference avoidance sensor device B to start the mapping.