METHOD FOR TREATING LIQUID TO DECOMPOSE RESIN BY CONTACTING OZONE GAS AND REMOVE ORGANIC ACID BY ION-EXCHANGE PROCESS

摘要

PURPOSE: A method for treating liquid is provide to stably reuse the liquid without any affect to a metal on a substrate.;CONSTITUTION: A method for treating liquid comprises: a step of contacting ozone gas with the liquid containing soluble carbonyl compounds and resin to decompose resin in the liquid; and a step of performing ion-exchange of the liquid to remove organic acid. The soluble carbonyl compound is at least one selected from gamma-butyrolactone, ethylene carbonate, ethylene acetate, and glycerol acetate.;COPYRIGHT KIPO 2011