DECOMPRESSION DRIER AND A DECOMPRESSION DRY METHOD, CAPABLE OF REDUCING A DRY TIME OF A PROCESSING LIQUID

摘要

PURPOSE: A decompression drier and a decompression dry method are provided to implement desired film property in a substrate by selecting processes performing decompression dry process of a coating film.;CONSTITUTION: In a decompression drier and a decompression dry method, a chamber(224) accommodates a target substrate(G). A maintaining unit is installed in the chamber and supports the target substrate. A first lifting unit(264) lifts up the maintain unit. An airflow control part(260) is installed in the lower part of the maintaining unit. A second lifting unit(278) lifts up the airflow control part.;COPYRIGHT KIPO 2011