BATCH TYPE APPARATUS FOR FORMING AN EPITAXIAL LAYER AND A METHOD FOR THE SAME, CAPABLE OF PRODUCING LARGE AMOUNT OF HIGH EFFICIENCY LED ELEMENTS HAVING THE SAME QUALITY

摘要

PURPOSE: A batch type apparatus for forming an epitaxial layer and a method for the same is provided to uniformly form an epitaxial layer on a substrate by rotating a boat while epitaxial layer is formed.;CONSTITUTION: A chamber(110) provides a space for an epitaxial layer. A boat loads a substrate holder(130) in which a plurality of substrates. The boat includes a plurality of support stands(121) and a connection member(122) connecting the supports stands. A heater(140) applies heat to a plurality of substrates. A gas supply unit(150) supplies a process gas into a chamber.;COPYRIGHT KIPO 2011