VERIFICATION SYSTEM ON MASK DATA USING REVERSE MASK TOOLING SPECIFICATION

摘要

PURPOSE: A mask data verifying system using a reverse mask tooling specification is provided to easily detect an error by secondly inspecting a second layout using the same database as a first inspection process. CONSTITUTION: A first layout is generated(S201). A first inspection is performed on the first layout(S202). The first layout is changed into mask GDS(Graphic Data System) data by writing a mask tooling specification(S205). The mask GDS data is changed into a second layout by writing a reverse mask tooling specification(S208). A second inspection is performed on the second layout by using the same database as the first inspection(S209).