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METHOD FOR MANUFACTURING A QUANTUM DOT USING A PATTERNED STRAINED LAYER AND QUANTUM DOT SEMICONDUCTOR DEVICE MADE BY THE SAME CAPABLE OF IMPROVING AN OPTICAL GAIN AND A TEMPERATURE PROPERTY
METHOD FOR MANUFACTURING A QUANTUM DOT USING A PATTERNED STRAINED LAYER AND QUANTUM DOT SEMICONDUCTOR DEVICE MADE BY THE SAME CAPABLE OF IMPROVING AN OPTICAL GAIN AND A TEMPERATURE PROPERTY
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机译:使用具有相同能力以改善光学增益和温度特性的图案化应变层和量子点半导体器件制造量子点的方法
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摘要
PURPOSE: A method for manufacturing a quantum dot using a patterned strained layer and a quantum dot semiconductor device made by the same are provided to form the quantum dot with high uniformity and density by using the patterned strained layer as a seed layer.;CONSTITUTION: A patterned strained layer(530a) and a patterned first capping layer(550a) are formed on a substrate(510) by patterning the first capping layer and the strained layer using an etching mask. A second capping layer(570) is formed after the first capping layer and the strained layer are patterned with a lattice format. A quantum dot forming material is formed on the upper side of the second capping layer. A plurality of self-formed quantum dots(590a) are formed on the upper side of the second capping layer.;COPYRIGHT KIPO 2011
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