SUBSTRATE GRINDING APPARATUS AND METHOD CAPABLE OF REALIZING FAST GRINDING SPEED USING A MULTI LEVEL OR MULTI GRINDING WHEEL

摘要

PURPOSE: A substrate grinding apparatus and method are provided to use an entire wheel stone, thereby lengthening the lifetime of a wheel.;CONSTITUTION: A transfer unit(5) transfers a loaded substrate(1) in one direction. A first grinding unit(110) processes the edges of the substrate. The first grinding unit comprises a multi level or multi grinding wheel(112,114). A second grinding unit(130) processes the processed edges to have a desired shape. The second grinding unit comprises a groove type gliding wheel(132,134).;COPYRIGHT KIPO 2011