MICRO COIL AND A MANUFACTURING METHOD THEREOF INCLUDING THE UNIT COIL PATTERN FORMED ALONG A HOLLOW CIRCUMFERENCE

摘要

PURPOSE: A micro coil and a manufacturing method thereof are provided to enhance a structural stability by laminating an anisotropic conductive film on a substrate having a coil pattern. ;CONSTITUTION: A plurality of substrates(10) form hollow parts at centers. A plurality of substrates form unit coil patterns(20) along the hollow parts. A plurality of substrates includes via holes(30) in which metal wirings(40) are formed. The metal wirings are filled in the via hole while they are electrically connected to the unit coil pattern formed on the substrates. The anisotropic conducting films(50) form hollow parts in correspondence with the hollow parts of the substrates. The anisotropic conductive films adheres a plurality of laminated substrates to one another.;COPYRIGHT KIPO 2011