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OPTICAL PERFORMANCE EVALUATION SYSTEM INCLUDING AN ARRANGEMENT METHOD OF A TWYMAN-GREEN LASER INTERFEROMETER AND A METHOD THEREOF
OPTICAL PERFORMANCE EVALUATION SYSTEM INCLUDING AN ARRANGEMENT METHOD OF A TWYMAN-GREEN LASER INTERFEROMETER AND A METHOD THEREOF
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机译:包含威曼格林激光干涉仪布置方法的光学性能评估系统及其方法
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摘要
PURPOSE: An optical performance evaluation system and a method thereof are provided to let a user easily arrange an optic device by making the precise arrangement of a performance evaluation system possible. ;CONSTITUTION: An optical performance evaluation system comprises: a first stage(100) provided with a conveyor and a fixture to regulate the horizontal position; a black body(400) fixed to the first stage and fixed with a target; a second stage(200) provided to one side of the black body and fixed to the conveyor of the first stage; an interferometer installed to the second stage; a plane mirror(700) provided to reflect the light radiated from a light source of the interferometer to the front; and an off-axis paraboloidal mirror(800) reflecting the light reflected from the plane mirror.;COPYRIGHT KIPO 2011
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