GAS SENSOR USING POROUS NANO FIBER CONTAINING A CONDUCTIVE CARBON MATERIAL AND A MANUFACTURING METHOD THEREOF FOR FORMING NANO FIBER CONTAINING A CONDUCTIVE CARBON MATERIAL BY ELECTRO-SPINNING

摘要

PURPOSE: A gas sensor using porous nano fiber containing a conductive carbon material and a manufacturing method thereof are provided to have very high sensitivity at room temperature by oxidizing, carbonizing and activating nano fiber and depositing between silicon wafer electrodes. ;CONSTITUTION: A manufacturing method of a gas sensor using porous nano fiber containing a conductive carbon material comprises the steps of: mixing a polymer precursor and a solvent; dispersing a metallic oxide to the obtained mixture; electro-spinning the obtained mixture, thereby manufacturing nano fiber; oxidizing the manufactured nano fiber; carbonizing the oxidized nano fiber; activating the carbonized nano fiber; and depositing the activated nano fiber between silicon wafer electrodes.;COPYRIGHT KIPO 2011