FUSE OF SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF, CAPABLE OF PREVENTING CONNECTION BETWEEN CUT FUSE AND ADJACENT FUSE BY FUSE RESIDUAL OF LASER CUTTING PROCESS

摘要

PURPOSE: A fuse of a semiconductor device and a manufacturing method thereof are provided to solve fuse fault occurred during fuse cutting by changing the shape of a fuse open region. ;CONSTITUTION: A number of fuse lines(205) are formed on a semiconductor substrate(200). An interlayer insulation film and a protection film(203) are formed on top of the fuse line. A fuse open region(210) is formed by etching the protection film and the interlayer insulation film in sequence. The fuse line exposed by the fuse open region is cut. The fuse open region includes a number of concave-convex parts among the fuse lines.;COPYRIGHT KIPO 2011