ELECTRON BEAM ALIGNING FARADAY CUP OF A MESH NETWORK STRUCTURE AND AN ELECTRON BEAM ALIGNING METHOD USING THE SAME

摘要

PURPOSE: A faraday cup for aligning electron beams and an electron beam aligning method using the same are provided to enable a beginner to easily perform electron beam aligning processes. ;CONSTITUTION: A central mesh network is located in the center of a faraday cup(100). A plurality of adjacent mesh networks surrounds the central mesh network. An insulating film separates the central mesh network and the adjacent mesh networks respectively.;COPYRIGHT KIPO 2011