INSULATION DEVICE OF A SINGLE CRYSTAL GROWING APPARATUS AND THE SINGLE CRYSTAL GROWING APPARATUS INCLUDING THE SAME CAPABLE OF CUTTING OFF HEAT FLOW EVEN BY USING CONVENTION OR RADIATION

摘要

PURPOSE: An insulation device of a single crystal growing apparatus and the single crystal growing apparatus including the same are provided to prevent degradation of a quartz furnace and increasing of a hot zone life time and to reduce process cost. ;CONSTITUTION: A single crystal growing apparatus(100) includes a chamber(110), a furnace(120), a heater(127) and a cooling tube(115). The furnace, installed within the chamber, holds a silicon solution. The heater, also installed within the chamber, heats the furnace. The cooling tube surrounds a single crystal ingot. An insulation device includes a plurality of insulation blocks separated from the first distance. The insulation device includes the first insulation layer between the insulation blocks.;COPYRIGHT KIPO 2011