MELT CONVECTION CONTROL SYSTEM AND A MELT CONVECTION CONTROL METHOD CAPABLE OF REDUCING LOSS DUE TO HEAT

摘要

PURPOSE: A melt convection control system and a melt convection control method are provided to effectively eliminate bubbles from a melt by bidirectional rotation, thereby increasing the quality of a single crystal. ;CONSTITUTION: A crucible(20) is located in a chamber(10). The crucible receives a silicon solution. A rotation shaft(23) rotates the crucible in a first direction(A) and a second direction(B). A crucible support stand(21) supports the crucible. A heater(30) is placed in the chamber to heat the crucible.;COPYRIGHT KIPO 2011