PHYSICAL AMOUNT DETECTING ELEMENT WITH A DOUBLE T-SHAPED PIEZOELECTRIC VIBRATION PIECE, PHYSICAL AMOUNT DETECTING DEVICE, AND ELECTRONIC DEVICE

摘要

PURPOSE: A physical amount detecting element, a physical amount detecting device, and an electronic device are provided to precisely detect an angular speed by decreasing the change of a resonant frequency due to the change of a temperature.;CONSTITUTION: A pair of connection arms are extended in an opposite direction along an X axis on a base plate. A pair of driving vibration arms are extended in an opposite direction along a Y axis on the base plate. A pair of first detection vibration arms(40a,40b) are extended in an opposite direction along a Y axis from one side of the connection arms. A pair of second detection vibration arms(50a,50b) are extended in an opposite direction along a Y axis from the other side of the connection arms. One side(30a) and the other side(30b) of the driving vibration arms vibrate with an inverse phase in an X axis direction. The first detection vibration arms and the second detection vibration arms vibrate with an inverse phase in a Y axis direction.;COPYRIGHT KIPO 2012