首页> 外国专利> DEVICE AND METHOD FOR TESTING A SEMICONDUCTOR DEVICE CAPABLE OF TESTING THE ELECTRIC PROPERTY OF A SEMICONDUCTOR DEVICE WHICH IS HEATED AT A TEST TEMPERATURE

DEVICE AND METHOD FOR TESTING A SEMICONDUCTOR DEVICE CAPABLE OF TESTING THE ELECTRIC PROPERTY OF A SEMICONDUCTOR DEVICE WHICH IS HEATED AT A TEST TEMPERATURE

机译:用于测试能够测试处于测试温度下的半导体装置的电性能的半导体装置的装置和方法

摘要

PURPOSE: A device and method for testing a semiconductor device are provided to rapidly test the semiconductor device by picking up the semiconductor device with a pickup unit, alternatively rotating the pickup unit, and mounting the pickup unit on a test socket.;CONSTITUTION: A loading unit(100) loads one or more trays mounting a plurality of semiconductor devices. A heating plate(200) receives the semiconductor device from the tray of the loading unit through a first transfer tool and heats the semiconductor device. A test unit(300) includes a test module, a pair of pickup units, a rotation moving unit, and a linear moving unit. The test modules have test sockets mounting the semiconductor device to test the electric property of the semiconductor device heated by the heating plate. The pair of pickup units picks up a plurality of semiconductor devices. The rotation moving unit rotates the pair of pickup units between a device exchange position and a device test position. The linear moving unit linearly moves the pickup unit to mount or separate the semiconductor devices.;COPYRIGHT KIPO 2012
机译:目的:提供一种用于测试半导体器件的设备和方法,以通过用拾取器单元拾取半导体器件,或者旋转拾取器单元并将拾取器单元安装在测试插座上,来快速测试半导体器件。装载单元(100)装载一个或多个安装有多个半导体器件的托盘。加热板(200)通过第一转移工具从装载单元的托盘接收半导体器件,并且加热半导体器件。测试单元(300)包括测试模块,一对拾取单元,旋转移动单元和线性移动单元。测试模块具有安装半导体器件的测试插座,以测试由加热板加热的半导体器件的电性能。一对拾取器单元拾取多个半导体器件。旋转移动单元使一对拾取单元在设备更换位置和设备测试位置之间旋转。线性移动单元线性移动拾音器单元以安装或分离半导体器件。; COPYRIGHT KIPO 2012

著录项

  • 公开/公告号KR20110113928A

    专利类型

  • 公开/公告日2011-10-19

    原文格式PDF

  • 申请/专利权人 JT CORPORATION;

    申请/专利号KR20100033278

  • 发明设计人 YOON WOON JOUNG;YOU HONG JUN;

    申请日2010-04-12

  • 分类号G01R31/26;H01L21/66;

  • 国家 KR

  • 入库时间 2022-08-21 17:50:52

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